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Magnetrons, reactive gases and sputtering

ByDiederik Depla

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This handbook covers the fundamental aspects of reactive magnetron sputter deposition. This physical vapor deposition technique is used to grow compound thin films. The books starts with an explanation of the four title words. Using a simple model several aspects of the deposition technique are introduced. In the following chapters the book introduces a more complete mode to address some specific features of reactive sputter deposition. Some important points related to thin film growth are introduced and illustrated. The reader is challenged by some questions, and can rely on a large database of material/reactive gas combinations.

Details

Publication Date
Sep 15, 2013
Language
English
ISBN
9781304347817
Category
Science & Medicine
Copyright
All Rights Reserved - Standard Copyright License
Contributors
By (author): Diederik Depla

Specifications

Pages
570
Binding
Case Wrap
Interior Color
Black & White
Dimensions
US Trade (6 x 9 in / 152 x 229 mm)

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