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MEMS Pressure Sensors: Fabrication and Process Optimization

ByParvej Ahmad Alvi

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MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.

Details

Publication Date
Dec 23, 2012
Language
English
ISBN
9788461622078
Category
Engineering
Copyright
All Rights Reserved - Standard Copyright License
Contributors
By (author): Parvej Ahmad Alvi

Specifications

Pages
174
Binding
Case Wrap
Interior Color
Black & White
Dimensions
US Trade (6 x 9 in / 152 x 229 mm)

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