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Magnetrons, reactive gases and sputtering By Diederik Depla
Hardcover: $80.00
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This handbook covers the fundamental aspects of reactive magnetron sputter deposition. This technique is a so-called physical vapor deposition technique allowing to grow compound thin films. The... More > books starts explaining the four title words. Using a simple model several aspects of the deposition technique are introduced. In the following chapters the book introduces a more complete model, allowing to understand some specific features of reactive sputter deposition. Finally, some important points related to thin film growth are introduced and illustrated.< Less