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Ion Implantation: Science and Technology (2008) By James Ziegler
Hardcover: $62.09
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This textbook covers both traditional ion implantation and also the current science problems and applications in CMOS technology. The chapters of the book include: -History of Integrated Circuits... More > & Ion Implantation -Ion Implantation and Current and Future CMOS ICs -Shallow Junctions – Problems and Solutions -Current Trends in Ion Implanters -Metrology of Ion Implantation -Radiation Damage of Silicon -Annealing of Radiation Damage in Silicon -SOI Wafers – Current & Future Directions -Development of Cluster Beam Technology -Ion Implanter Concepts -Source Physics and Maintenance -End Station Problems – Dosimetry, Contamination, Charging and Cooling -Safety in Ion Implantation -New Directions in Ion Implantation & Plasma Doping -Shallow Junctions (Cluster beams, TED Inhibitors, SOI) -Non-Silicon Semiconductors with SOI Wafers< Less

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